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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53135275(A)
申请公布日期
1978.11.25
申请号
JP19770050359
申请日期
1977.04.28
申请人
NIPPON ELECTRIC CO
发明人
KATAGAWA TETSUYA
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
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地址
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