A method of moving bubbles includes utilizing optical tweezers to form a bright photoresist area and a dark photoresist area in the photoresist layer. The bubbles in the photoresist layer move from the bright photoresist area to the dark photoresist area.
申请公布号
US2008067335(A1)
申请公布日期
2008.03.20
申请号
US20060457816
申请日期
2006.07.17
申请人
HOU YA-CHING;TSENG HUAN-TING;LIN BENJAMIN SZU-MIN;LU BO-JOU;HUANG YONG-FA;YU CHUN-CHI
发明人
HOU YA-CHING;TSENG HUAN-TING;LIN BENJAMIN SZU-MIN;LU BO-JOU;HUANG YONG-FA;YU CHUN-CHI
