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发明名称
摘要
申请公布号
DE2702446(B2)
申请公布日期
1978.11.23
申请号
DE19772702446
申请日期
1977.01.20
申请人
SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN
发明人
LISCHKE, BURKHARD, DR.-ING.;OELMANN, ANDREAS, DR.-ING.
分类号
H01J37/30;H01J37/302;(IPC1-7):H01J37/30;H01L21/26;H01L21/82
主分类号
H01J37/30
代理机构
代理人
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