VORRICHTUNG ZUR HERSTELLUNG HALBLEITENDER MEHRSCHICHTSTRUKTUREN NACH DEM FLUESSIGPHASENEPITAXIEVERFAHREN,申请号DD19770199641-传众专利搜索

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发明名称	VORRICHTUNG ZUR HERSTELLUNG HALBLEITENDER MEHRSCHICHTSTRUKTUREN NACH DEM FLUESSIGPHASENEPITAXIEVERFAHREN
摘要
申请公布号	DD132923(A1)	申请公布日期	1978.11.22
申请号	DD19770199641	申请日期	1977.06.23
申请人	HERRMANN,FRANK-PETER,DD;METHLING,LOTHAR,DD	发明人	HERRMANN,FRANK-PETER,DD;METHLING,LOTHAR,DD
分类号	(IPC1-7):B01J17/06	主分类号	(IPC1-7):B01J17/06
代理机构		代理人
主权项
地址

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