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发明名称
VAPOR PHASE GROWING METHOD FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPS53134360(A)
申请公布日期
1978.11.22
申请号
JP19770048523
申请日期
1977.04.28
申请人
FUJITSU LTD
发明人
KOMENO JIYUNJI
分类号
C30B25/02;C30B29/40;C30B29/42;H01L21/205
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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