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发明名称
BOAT FOR LIQUID PHASE EPITAXIAL GROWTH
摘要
申请公布号
JPS53133368(A)
申请公布日期
1978.11.21
申请号
JP19770049149
申请日期
1977.04.27
申请人
OMRON TATEISI ELECTRONICS CO
发明人
SHIMURA MIKIHIKO
分类号
C30B19/06;H01L21/208;H01L21/68
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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