| 摘要 |
PURPOSE:To avoid the contact of a probe to a silicon nitride film and to prevent the occurrence of cracks by separating the end of a window in the silicon nitride film away from a part on a bonding pad electrode. CONSTITUTION:A silicon nitride film 4 as a passivation film is formed so that a window is formed for a bonding pad electrode 2. Namely, the end of the window of the silicon nitride 4 which covers the surrounding part of the bonding pad electrode 2 is not formed at the surrounding part of the bonding pad electrode 2. As a result, a probe 5 does not come to the neighboring part of the end of the window even if the probe of a probe card is largely deviated when the electric characteristics are measured. Thus, cracks scarcely occur in the silicon nitride film 4. |
