CONDUCTOR LAYER MANUFACTURING METHOD

摘要

Provided is a method for manufacturing a titanium oxide conductor layer having excellent conductivity and transparency with high productivity. The conductor layer is manufactured by sequentially forming a first layer and a second layer, which are made of titanium oxide wherein a dopant such as Nb is added, on a substrate in a state where the substrate is heated. The first layer is formed under film forming conditions for forming a layer containing polycrystal which does not contain rutile type crystal. The second layer is formed under film forming conditions for obtaining a layer containing polycrystal which contains rutile type crystal when the layer is directly formed on the substrate.