发明名称 Increasing gas gauge pressure sensitivity using nozzle-face surface roughness
摘要 A gas gauge for sensing distance to an object includes a gas supply system and a nozzle that supplies the gas from the gas supply system to a space between the nozzle and the object. For example, the gas supply system supplies the gas with a flow rate that corresponds to a flow in a transitional region between laminar flow and turbulent flow. A surface of the nozzle may be roughened so as to increase a friction factor across the surface, which increases gas pressure drop and also a gain of the nozzle. Noise generated by the increased flow rate may be attenuated using one or more strategically placed Helmholtz attenuators and/or snubbers.
申请公布号 US7578168(B2) 申请公布日期 2009.08.25
申请号 US20070769421 申请日期 2007.06.27
申请人 ASML HOLDING N.V. 发明人 VOGEL HERMAN
分类号 G01B13/08 主分类号 G01B13/08
代理机构 代理人
主权项
地址