METODO PER IL CONTROLLO OTTICO DELLE DIMENSIONI LATERALI DI UN DISEGNO IN UN CIRCUITO INTEGRATO.,申请号IT19780029828-传众专利搜索

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发明名称	METODO PER IL CONTROLLO OTTICO DELLE DIMENSIONI LATERALI DI UN DISEGNO IN UN CIRCUITO INTEGRATO.
摘要
申请公布号	IT7829828(D0)	申请公布日期	1978.11.15
申请号	IT19780029828	申请日期	1978.11.15
申请人	RCA CORP.	发明人
分类号	G01B11/02;G03F7/20;(IPC1-7):H01L/	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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