| 摘要 |
PURPOSE:To reduce a laser machining cost by stopping supply and discharge of gas when a time from the stop to the start of a laser oscillation is larger than a set time, and conducting for the set time before the stopping time becomes larger than the set time. CONSTITUTION:Assume that, when the waiting time between first and second laser machining times is long, the application of a high voltage is stopped at a time t11 and the voltage is reapplied at a time t12. T1: time indicated by (t12-t11) is an application stopping time far an optical resonator 1, and when a set time T1 is exceeded, gas supply and discharge are stopped. When a set time: Tb is elapsed, gas is supplied to and discharged from a circulation passage, stopped after a time Tc to pause the auxiliary exchange of gas, and auxiliary exchange of the gas is conducted during a set time :Tc before the stopping time: t2 becomes larger than the set time Tb. A high voltage is reapplied between the electrodes of the optical resonator 1 at the time t12, and the gas is simultaneously supplied and discharged. As a result, the reoscillation of the laser is immediately executed, and a laser machining cost is reduced by the reduction in the gas using amount. |
