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发明名称
摘要
申请公布号
JPS5342625(B2)
申请公布日期
1978.11.13
申请号
JP19740076388
申请日期
1974.07.05
申请人
发明人
分类号
H01L21/66;H01L21/22
主分类号
H01L21/66
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代理人
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