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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53129970(A)
申请公布日期
1978.11.13
申请号
JP19770044459
申请日期
1977.04.20
申请人
HITACHI LTD
发明人
ISHIKAWA TAKASHI;KONDOU HIROYUKI
分类号
H01L21/283;H01L21/314;H01L21/316
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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