,申请号FR19730041234-传众专利搜索

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发明名称
摘要
申请公布号	FR2208191(B1)	申请公布日期	1978.11.10
申请号	FR19730041234	申请日期	1973.11.20
申请人	FUJITSU LTD	发明人
分类号	C23F4/00;H01L21/00;H01L21/28;H01L21/302;H01L21/3065;H01L21/3213;H01L23/485;H05K3/08;(IPC1-7):01L7/00;01L9/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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