发明名称 AN UNDULATOR
摘要 A mechanical interface for an undulator module comprises: a body, a laser beam sensor and an alignment feature. The laser beam sensor is attached to the body and is operable to determine the position of a reference laser beam relative to part of the mechanical interface. The alignment feature on the body is arranged to allow the mechanical interface to engage with an undulator module such that the laser beam sensor is maintained in fixed relationship with a magnetic centre of the undulator module.
申请公布号 WO2016096239(A1) 申请公布日期 2016.06.23
申请号 WO2015EP75912 申请日期 2015.11.06
申请人 ASML NETHERLANDS B.V. 发明人 DONDERS, SJOERD, NICOLAAS, LAMBERTUS;RENKENS, MICHAEL, JOZEF, MATHIJS
分类号 H01S3/09;G01B11/27;G03F7/20;H05H7/00;H05H7/04 主分类号 H01S3/09
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