发明名称 |
VAPOR DEPOSITING DEVICE |
摘要 |
PURPOSE:To provide the subject device wherein one end of a boat made of a high melting point metal is fixed to an electrode bar and another end thereof is fixed to an electroconductive rod movable in the horizontal direction, and a substrate heating device capable of heating the substrate be vapor deposited at a temperature above the predetermined temperature is provided; which is adapted for mass production and capable of curtailing time. |
申请公布号 |
JPS53128585(A) |
申请公布日期 |
1978.11.09 |
申请号 |
JP19770042618 |
申请日期 |
1977.04.15 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
YASUDA MICHIROU;OGAWA NAGAJI;ASAKA MASAYUKI;YAMAZAKI TAKASHI |
分类号 |
C23C14/26;C23C14/50;H01L21/285 |
主分类号 |
C23C14/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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