发明名称 VAPOR DEPOSITING DEVICE
摘要 PURPOSE:To provide the subject device wherein one end of a boat made of a high melting point metal is fixed to an electrode bar and another end thereof is fixed to an electroconductive rod movable in the horizontal direction, and a substrate heating device capable of heating the substrate be vapor deposited at a temperature above the predetermined temperature is provided; which is adapted for mass production and capable of curtailing time.
申请公布号 JPS53128585(A) 申请公布日期 1978.11.09
申请号 JP19770042618 申请日期 1977.04.15
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 YASUDA MICHIROU;OGAWA NAGAJI;ASAKA MASAYUKI;YAMAZAKI TAKASHI
分类号 C23C14/26;C23C14/50;H01L21/285 主分类号 C23C14/26
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