发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To even the spreading of depletion layer and improve high frequency characteristics by providing a cavity around the mesa type junction region formed with a depletion region, and forming a high resistance semiconductor substance through this.
申请公布号 JPS53126872(A) 申请公布日期 1978.11.06
申请号 JP19770042417 申请日期 1977.04.12
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ITOU KUNIO;INOUE MORIO;ASAHI KUNIHIKO
分类号 H01L29/872;H01L29/47 主分类号 H01L29/872
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