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经营范围
发明名称
LIQUID PHASE EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPS53125276(A)
申请公布日期
1978.11.01
申请号
JP19770040580
申请日期
1977.04.08
申请人
FUJITSU LTD
发明人
ITOU MICHIHARU
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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