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经营范围
发明名称
CHUCKING FOR WAFER
摘要
申请公布号
JPS53124077(A)
申请公布日期
1978.10.30
申请号
JP19760149699
申请日期
1976.12.15
申请人
HITACHI LTD;HITACHI ELECTR ENG
发明人
SASAKI TAMOTSU;SUZUKI SHINPEI;TAKAHASHI MASUO;IWAMA SATORU
分类号
B25B11/00;H01L21/306;H01L21/68
主分类号
B25B11/00
代理机构
代理人
主权项
地址
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