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发明名称
ION SOURCE
摘要
申请公布号
JPS53123797(A)
申请公布日期
1978.10.28
申请号
JP19770038726
申请日期
1977.04.05
申请人
TAKAGI TOSHINORI;NISSIN ELECTRIC CO LTD
发明人
TAKAGI TOSHINORI;KATOU TETSUYOSHI;MATSUDA KOUJI;HAYASHI KOUJI
分类号
H01J3/04;H01J27/00;H01J27/04
主分类号
H01J3/04
代理机构
代理人
主权项
地址
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