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发明名称
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申请公布号
JPS5340343(B2)
申请公布日期
1978.10.26
申请号
JP19720089255
申请日期
1972.09.05
申请人
发明人
分类号
G01B11/00;G01V8/10;H01L31/0264;H01L31/18
主分类号
G01B11/00
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