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发明名称
摘要
申请公布号
DE2554426(B2)
申请公布日期
1978.10.26
申请号
DE19752554426
申请日期
1975.12.03
申请人
SIEMENS AG, 000 BERLIN UND 8000 MUENCHEN
发明人
MURRMANN, HELMUTH, DIPL.-PHYS. DR., 8012 OTTOBRUNN;WITTENZELLNER, ERNST, DIPL.-ING., 8000 MUENCHEN
分类号
H01L21/8226;H01L21/265;H01L21/331;H01L21/74;H01L27/02;H01L27/082;H01L29/73;(IPC1-7):H01L21/265
主分类号
H01L21/8226
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