| 摘要 |
PURPOSE:To provide the subject method comprising the steps of : evaporating and concentrating a treatment solution in the subject device, thereafter stopping the supply of the treatment solution, and cleaning the interior of the device with a cleaning solution in a quantity less than that of the limit of the evaporative function of the device, whereby the matters adhering to the interior of the device can be removed without the infiltration of the cleaning solution in the residue side. |
