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发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPS53121569(A)
申请公布日期
1978.10.24
申请号
JP19770036693
申请日期
1977.03.31
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
ONGA SHINJI;YASUDA YUKIO
分类号
C30B25/12;C30B25/14;H01L21/205;H01L21/31
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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