,申请号JP19760132614-传众专利搜索

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发明名称
摘要
申请公布号	JPS5339750(B2)	申请公布日期	1978.10.23
申请号	JP19760132614	申请日期	1976.11.04
申请人		发明人
分类号	H01J37/09;G03F7/20;H01J37/28;H01J37/30;H01L21/027;H01L21/312	主分类号	H01J37/09
代理机构		代理人
主权项
地址

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