发明名称 PHOTOSENSITIVE SOLUTION FOR FORMING CIRCUIT BY LIGHT EXPOSURE
摘要 PURPOSE:To eliminate the defects of a Sn<2>+ -hydrochloric acid series forming a metalic pattern directly by photochemical reaction, and to improve photosensitivity and resolution, by adding Sn<4>+ to this series.
申请公布号 JPS53120519(A) 申请公布日期 1978.10.21
申请号 JP19770034572 申请日期 1977.03.30
申请人 HITACHI LTD 发明人 MATSUO AKIRA;OKA HITOSHI;NAKAMURA KENJI
分类号 H05K3/18;G03C1/725;H01L21/027 主分类号 H05K3/18
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