ELECTRON BEAM EXPOSURE DEVICE,申请号JP19770035803-传众专利搜索

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发明名称	ELECTRON BEAM EXPOSURE DEVICE
摘要
申请公布号	JPS53120277(A)	申请公布日期	1978.10.20
申请号	JP19770035803	申请日期	1977.03.29
申请人	NIPPON ELECTRIC CO	发明人	SUZUKI KATSUMI
分类号	H01L21/027;H01L21/26	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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