发明名称 WIRE FEEDING MECHANISM FOR NAILLHEAD WIRE BONDER
摘要 PURPOSE:To secure an assured lead-in of the wire into the capillary and thus to ensure an accurate wire bonding, by providing densely a number of micro jetting holes over the entire range of the inner circumference wall of a ring guide which guides the wire to jet the gas through these holes.
申请公布号 JPS53120266(A) 申请公布日期 1978.10.20
申请号 JP19770034513 申请日期 1977.03.30
申请人 HITACHI LTD 发明人 KOBAYASHI YOSHIHIKO
分类号 H01L21/60 主分类号 H01L21/60
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