| 摘要 |
PURPOSE:To work the body to be worked of spherical surface in Angstrom rms surface roughness number by fitting the surface plate on which a spherical face part is formed so as to attach easily to the device main body and executing spherical facing of the spherical face part by the working machine provided separately. CONSTITUTION:A surface plate 1 forming a spherical face 13 is sticked by an adhesive to a base plate 16 and the through hole of the base plate 16 is fitted to the projecting part 17 of a bottom plate 18. The base plate 16 is pinched/fixed by a bonding plate 19 and the bottom plate 18, on one part, the body W to be worked is sticked by an adhesive to a false bowl 35. A surface plate shaft 9 is pivotally supported with static pressure by engaging the spherical main part 37 of a rocking shaft 38 by fitting into the tommy bearing part 36 of the sticking bowl 35. A motor 30 is actuated and the surface plate 1 fitted to a surface plate shaft 9 is rotated via a speed reducing device 29 and coupling 28. Simultaneously, the rocking shaft 38 is driven in an arrow mark 39 direction by a crank mechanism 40. Thus float/polishing are progressed by the SiO2 ultrafine particle in a liquid film 43. As a result, the spherical face 13 of the surface plate 1 is transferred on the face 42 to be worked and the surface roughness becomes in about Angstrom rms number. |
