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发明名称
PATTERN TRANSFER METHOD TO PHOTO RESIST FILM
摘要
申请公布号
JPS53116784(A)
申请公布日期
1978.10.12
申请号
JP19770031935
申请日期
1977.03.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAGATA KAZUSHI
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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