| 发明名称 |
RADIOACTIVEERAY SENSITIVE MATERIAL |
| 摘要 |
PURPOSE:To enhance the sensitivity for radioactive rays so as to easily form a fine and highly precise positive type pattern by using a (co) polymer of isopropenyl ester of halogen-substituted alkylate. |
| 申请公布号 |
JPS53116831(A) |
申请公布日期 |
1978.10.12 |
| 申请号 |
JP19770031029 |
申请日期 |
1977.03.23 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
WATANABE HARUAKI;HIDEYAMA AKIZOU;MIYAMURA MASATAKA |
| 分类号 |
H01L21/027;G03C1/72;G03F7/039;G03G5/00;H01L21/302;H05K3/06 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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