METHOD AND SYSTEM FOR CORRECTING AN ABERRATION OF A BEAM OF CHARGED PARTICLES

摘要

METHOD AND SYSTEM FOR CORRECTING AN ABERRATION OF A BEAM OF CHARGED PARTICLES A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45.degree. to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.