发明名称 METHOD FOR PRODUCING BBALMINA FILM
摘要 PURPOSE:To provide a method for producing a beta-alumina film, comprising using as a target material a molded article of single beta-alumina or a molded article consisting of Al2O3 and NaAlO2 or KalO2, and subjecting the material to highfrequency spattering, thereby to produce accurately a tight beta-alumina film on the base plate.
申请公布号 JPS53115694(A) 申请公布日期 1978.10.09
申请号 JP19770030774 申请日期 1977.03.18
申请人 SUMITOMO CHEMICAL CO 发明人 AOYANAGI MASAYA;WADA TAKESHI
分类号 C23C14/06;C01F7/02;C23C14/08 主分类号 C23C14/06
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