发明名称 |
SAMPLE MOVER OF ELECTRIC STRAIN TYPE |
摘要 |
PURPOSE:To fix and move highly precisely a sample without any external stress with the use of a sample by making it possible to interchange into the opposite polarity the voltage between a sample table and an electrostatic clutch and the sample. |
申请公布号 |
JPS53114444(A) |
申请公布日期 |
1978.10.05 |
申请号 |
JP19770027973 |
申请日期 |
1977.03.16 |
申请人 |
HITACHI LTD |
发明人 |
ISHIKAWA KIYOSHI;HOKOTANI YOSHIO |
分类号 |
G02B7/00;B01L9/02;B01L99/00;G02B7/04;G02B7/28;G02B21/26;G02B27/00;G12B5/00 |
主分类号 |
G02B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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