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发明名称
摘要
申请公布号
JPS5340988(Y2)
申请公布日期
1978.10.03
申请号
JP19740051629U
申请日期
1974.05.09
申请人
发明人
分类号
G01R31/26;G01B9/04;G02B21/00;G02B21/18;H01L21/66;H01L31/00;H01L31/02;(IPC1-7):G01B9/04
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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