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发明名称
GAS PLASMA ETCHING METHOD
摘要
申请公布号
JPS53113234(A)
申请公布日期
1978.10.03
申请号
JP19770028351
申请日期
1977.03.15
申请人
FUJITSU LTD
发明人
YANAGIDA KENZOU;YAMAGISHI FUMIO
分类号
C23F4/00;C23F1/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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