| 发明名称 |
COPPER AND COPPER ALLOY ETCHING SOLUTIONS AND PROCESS |
| 摘要 |
<p>This invention provides copper and copper alloy etching solutions comprising a mixed aqueous solution of a peroxysulfate with a diazine compound and a halogen compound added as the catalyst. There is also provided a process for etching copper and copper alloys with said etching solutions.</p> |
| 申请公布号 |
CA1039631(A) |
申请公布日期 |
1978.10.03 |
| 申请号 |
CA19740209481 |
申请日期 |
1974.09.18 |
| 申请人 |
TOKAI DENKA KOGYO KABUSHIKI KAISHA |
发明人 |
MATSUMOTO, AKIRA;ITANI, KATSUTOSHI |
| 分类号 |
C23F1/18;H05K3/06;(IPC1-7):23F1/02 |
主分类号 |
C23F1/18 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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