发明名称 PRODUCTION OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To space effective regions and a glass mask and avert the pinhole production of the effective regions owing to the dust, Si chips, etc. deposited on the mask by forming the portions of a semiconductor substrate other than effective regions where elements are going to be formed by diffusion, in raised form, and closing contacting a glass mask to the raised portions.
申请公布号 JPS53112067(A) 申请公布日期 1978.09.30
申请号 JP19770028161 申请日期 1977.03.11
申请人 SANYO ELECTRIC CO;TOKYO SANYO ELECTRIC CO 发明人 TANAKA TADAHIKO
分类号 H01L21/306;H01L21/027;H01L21/302 主分类号 H01L21/306
代理机构 代理人
主权项
地址