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发明名称
PHOTOMASK ORIGINAL PLATE
摘要
申请公布号
JPS53108285(A)
申请公布日期
1978.09.20
申请号
JP19770022245
申请日期
1977.03.03
申请人
HATTORI ISAO
发明人
HATSUTORI ISAO
分类号
G03F1/00;G03F1/54;G03F1/58;H01L21/027;H01L21/302
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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