发明名称 Method for manufacture of a semiconductor device
摘要 A semiconductor device and method of making the same is disclosed having a surface passivation film of a polycrystalline silicon layer containing 2 to 45 atomic percent of oxygen atoms.
申请公布号 US4114254(A) 申请公布日期 1978.09.19
申请号 US19760669326 申请日期 1976.03.22
申请人 SONY CORPORATION 发明人 AOKI, TERUAKI;ABE, MOTOAKI
分类号 H01L29/78;H01L21/00;H01L21/316;H01L21/331;H01L21/336;H01L29/00;H01L29/73;(IPC1-7):B01J17/00 主分类号 H01L29/78
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