| 摘要 |
PURPOSE:To enable sintering to be achieved at low temperature without adding the special additive such as sintering auxiliary by a method in which the ultrafine powder ceramic produced by using plasma process is sprayed on a base plate under nonatmospheric pressure by using air current and is deposited these, and then said ceramic is sintered under nonatmospheric pressure. CONSTITUTION:The ultrafine powder ceramic having the average particle diameter of 1mum or less produced by plasma process, is sprayed on a base plate by using the air current such as nitrogen, helium, argon or hydrogen and is deposited thereon. A strong deposit is obtained by the heat generated in the collision of the ultrafine particles to the base plate due to the spraying. In the ultrafine powder ceramic, the sintered object containing aluminum nitride has excellent heat conductivity. The deposited material is normally deposited into the sheet shape with the thickness of 0.2-2mm. Combustion is carried out under the atmosphere without oxygen, and preferably under the atmosphere of the pressurized nitrogen and/or argon of 1-2000 atmospheric pressure. The sintering temperature is preferably 1000-2000 deg.C, and is suitably selected according to the kind of the ceramic. |
