| 摘要 |
PURPOSE:To decrease a reflection loss and to improve light transmittance by providing an antireflection layer on the surface of the lens formed by a laser CVD method. CONSTITUTION:A gaseous mixture composed of, for example, SiH4, NO and NH3 is sealed into a CVD cell and the surface of a quartz substrate previously installed in the CVD cell is perpendicularly irradiated with a gaseous CO2 laser beam to form an SiON dielectric coating. The central part of this SiOH dielectric coating fits to a spherical face and has a lens effect. Since the microlens formed in such a manner has a high surface reflectivity, the antireflection layer is provided by vapor deposition, etc., on the round surface of the lens and the non-vapor-deposited surface of the quartz substrate. The loss of the light quantity by surface reflection is decreased in this way and the light transmittance is improved. |
