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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53105172(A)
申请公布日期
1978.09.13
申请号
JP19770019935
申请日期
1977.02.24
申请人
NIPPON ELECTRIC CO
发明人
FUKUYAMA MASAHIRO
分类号
G05D3/12;G05D3/00;H01L21/60;H01L21/68
主分类号
G05D3/12
代理机构
代理人
主权项
地址
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