| 发明名称 |
Vacuum deposition method for frequency adjustment of piezoelectric resonators |
| 摘要 |
Vacuum deposition method for adjusting the resonant frequency of piezoelectric resonators wherein the speed and accuracy of the process are enhanced by abrupt termination of the deposition through injection of a gas into the vacuum chamber at the end of the adjustment cycle.
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| 申请公布号 |
US4112134(A) |
申请公布日期 |
1978.09.05 |
| 申请号 |
US19760669328 |
申请日期 |
1976.03.22 |
| 申请人 |
TRANSAT CORP. |
发明人 |
BUYNAK, GABRIEL RALPH;SAUERLAND, FRANZ LUDWIG |
| 分类号 |
C23C14/24;C23C14/54;H03H3/04;(IPC1-7):B05D5/12;C23C13/04 |
主分类号 |
C23C14/24 |
| 代理机构 |
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| 主权项 |
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