发明名称 |
Method of projecting a beam of charged particles |
摘要 |
Disclosed is a method of projecting on selected areas of a target a variety of charged particles each having a different shape of cross-section. The charged particle projecting method according to this invention is suitable for production of micro-circuits.
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申请公布号 |
US4112305(A) |
申请公布日期 |
1978.09.05 |
申请号 |
US19760732919 |
申请日期 |
1976.10.15 |
申请人 |
RIKAGAKU KENKYUSHO |
发明人 |
GOTO, EIICHI;SOMA, TAKASHI;IDESAWA, MASANORI |
分类号 |
H01J37/305;H01J37/30;H01L21/027;(IPC1-7):A61K27/02 |
主分类号 |
H01J37/305 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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