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发明名称
SUBSTRAET FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS53101270(A)
申请公布日期
1978.09.04
申请号
JP19770015904
申请日期
1977.02.16
申请人
SUWA SEIKOSHA KK
发明人
YABUSHITA TETSUO
分类号
H01L21/60;H01L23/50
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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