| 发明名称 |
PREPARATION OF THIN FILM PATTERN |
| 摘要 |
PURPOSE:To carry out leveling easily with high yield by forming metal film composed of two layers and previously side-etching one layer in leveling patterned surface of lower by lift-off method. |
| 申请公布号 |
JPS53100499(A) |
申请公布日期 |
1978.09.01 |
| 申请号 |
JP19770015147 |
申请日期 |
1977.02.15 |
| 申请人 |
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发明人 |
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| 分类号 |
G11C11/14;H01F41/14;H05K3/00;H05K3/46 |
主分类号 |
G11C11/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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