发明名称 Device which makes it possible to effect the programmed tracing of figures which have different shapes
摘要 A device to effect the programmed tracing of figures which have different shapes comprises two electron-optical systems respectively associated with two diaphragms. The first system forms the image of the first diaphragm at a fixed magnification, on the second diaphragm. The first electrically controlled deflection system makes it possible to displace said image in said plane. A second system forms an image of the thus defined diaphragm, in the object plane. A second deflection system makes it possible to displace said latter image in the object plane.
申请公布号 US4110622(A) 申请公布日期 1978.08.29
申请号 US19770796708 申请日期 1977.05.13
申请人 THOMSON-CSF 发明人 TROTEL, JACQUES
分类号 H01J37/147;H01J37/30;H01J37/302;H01L21/027;(IPC1-7):G21K1/08 主分类号 H01J37/147
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