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发明名称
摘要
申请公布号
JPS5330477(B2)
申请公布日期
1978.08.26
申请号
JP19730041867
申请日期
1973.04.13
申请人
发明人
分类号
H01L23/32;H01L21/52;H01L21/762
主分类号
H01L23/32
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代理人
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