发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To lower the wiring resistance of the entire part of the device by making poly-Si thin film wirings to the insulation film on the main surface of a substrate, and selectively covering the selective opening parts of the insulation film covering these with a metal thin-film.
申请公布号 JPS5397790(A) 申请公布日期 1978.08.26
申请号 JP19770012760 申请日期 1977.02.07
申请人 NIPPON ELECTRIC CO 发明人 AOMURA KUNIO;OKADA KENJI
分类号 H01L23/52;H01L21/28;H01L21/3205;H01L21/768;H01L23/528;H01L29/43 主分类号 H01L23/52
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